| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measurement method which solves a problem that conventional model-based measurement methods, which can estimate a cross-sectional shape by matching a variety of pre-created cross-sectional shapes with a library of SEM signal waveforms, do not have a function for determining whether or not a modeling of a cross-sectional shape is appropriate or a function for checking a probability of the estimated result. <P>SOLUTION: Before measuring an actual pattern by the model-based measurement, a solution space (predicted solution space) is determined by matching between waveforms in a library, and then presented. After measuring the actual pattern by the model-based measurement, a solution space (actual solution space) is determined by matching between an actual waveform and a waveform in the library, and then presented. <P>COPYRIGHT: (C)2012,JPO&INPIT |
