AIR BRIDGE STRUCTURE OF COPLANAR LINE

摘要

PROBLEM TO BE SOLVED: To easily use a plurality of air bridges while suppressing the influence of the cross capacity of the signal line of a coplanar line and the air bridges.

SOLUTION: In an air bridge structure 100, a lower layer wiring layer 8 is provided with hole areas 12A and 12B formed by notching positions facing each other across a signal line 1 in ground lines 2A and 2B respectively, also an upper layer wiring layer 7 is provided with an upper layer ground electrode 13A electrically connected with the ground line 2A of the lower layer wiring layer 8 at the upper position of the hole area 12A and an upper layer ground electrode 13B electrically connected with the ground line 2B of the lower layer wiring layer 8 at the upper position of the hole area 12B, and the ground lines 2A and 2B are electrically connected through the upper layer ground electrodes 13A and 13B by an air bridge 3.

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