摘要 |
<P>PROBLEM TO BE SOLVED: To provide a needle-like microstructure which is mainly composed of silicon. <P>SOLUTION: A crystalline silicon region is formed over a metal substrate by an LPCVD method, whereby whisker-like crystalline silicon consisting of a polycrystalline body which grows in the <110> direction or the <211> direction by letting ä111} plane be a twin crystal plane can be obtained. Whisker-like crystalline silicon grows while forming a twin crystal (introducing stacking faults), and an initial nucleus is arranged so that the normal direction <111> of the twin crystal plane is always included in the plane perpendicular to the growth direction of whisker-like crystalline silicon and in the perpendicular plane (in a transverse cross section). Such a material is used as a negative electrode active material of a lithium-ion secondary battery and for a photoelectric conversion device such as a solar battery. <P>COPYRIGHT: (C)2012,JPO&INPIT |