| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interference objective lens device excellent in operability and function at a low cost and an optical interference measurement device having the interference objective lens . <P>SOLUTION: The interference objective lens device includes an objective lens 31 for converging light output from a light emission part 10 to a work W, a reference mirror 32 arranged closer to the side of the work W than the objective lens 31, a branching and synthesizing member 33 for branching the light passing through the objective lens 31 into a reference optical path having the reference mirror 32 and a measurement optical path where the work W is arranged and synthesizing reflected light from the reference mirror 32 with reflected light from the work W so as to output it as interference light and light quantity adjustment means (a liquid crystal panel 34 and a control part 70) for adjusting light quantity of either of the reflected light from the reference mirror 32 or the reflected light from the work W for the other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
