COATING INSTALLATION AND COATING METHOD

摘要

A coating method can use a coating device containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device. Electric current can be supplied to the activation element via at least two contact elements and the contact elements are fastened so as to be virtually immobile relative to the recipient. The activation element is arranged so as to be mobile relative to the recipient.