| 摘要 |
Embodiments of the present invention provide a method and system for manufacturing copper-based capacitor on an integrated circuit. For example, the integrated circuit is associated with a channel length of less than 0.13 um. It is to be appreciated that, depending upon application, the present invention provides a more improved method for manufacturing capacitors and thus allow MIM capacitors to be manufactured at smaller dimensions. The method includes a step for providing a substrate. The method also includes a step for providing a layer of inter-metal dielectric overlaying the substrate. The method additionally includes a step for providing a bottom layer. The bottom layer includes a first portion and a second portion. The first portion can be characterized as electrically conductive. In addition, the method includes a step for providing a first insulating layer overlaying the bottom layer. |
