Silicone coating composition

摘要

The present invention relates to a composition comprising:
(a) a polymer having at least one repeating unit of formula
where R 1 is a non-hydrolysable group and n is an integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful in forming low k dielectric constant materials and as well as hard mask and underlayer materials with anti-reflective properties for the photolithography industry.