WAFER INSPECTION DEVICE AND WAFER INSPECTION SYSTEM HAVING THE SAME

摘要

PURPOSE: A wafer inspection device and a wafer inspection system including the same are provided to maximize accuracy of a wafer inspection process by simultaneously recording a plurality of inspection points using a single inspection camera. CONSTITUTION: A wafer reflector(510a,510b) reflects an image of the upper or lower surface of a wafer boundary in a first direction vertical to a side surface of a wafer. A camera(100) simultaneously records a side surface image of the wafer and an upper or lower surface image of the wafer boundary reflected from the wafer reflector. A displacement device(800) simultaneously transfers the reflector and the camera in a direction parallel to the first direction. A controller controls the displacement device and the camera by determining defects of the wafer boundary through an image recorded from the camera.