| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film-shaped resin lamination apparatus which does not pollute the environment of a clean room, makes a film-shaped resin material have good adhesion/followability to a substrate, and produces a laminated film-shaped resin layer with excellent film thickness uniformity and surface smoothness. <P>SOLUTION: The film-shaped resin lamination apparatus comprises a pair of press means 10 facing each other which is installed; and a vacuum lamination device 2 in which a hydraulic cylinder 22 is connected to at least one of the press means 10, which makes one of the press means 10 be able to proceed/recede with respect to the other by operating the hydraulic cylinder 22. A laminate 9 is formed by laminating the film-shaped resin material on an uneven side of the substrate in which at least one side is uneven by the vacuum lamination device 2. An air pressure-hydraulic pressure conversion means which converts the pressure of gas supplied from a high pressure gas supply source into the pressure of a hydraulic fluid in the hydraulic cylinder 22 by increasing the gas pressure is provided. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
