HAND FOR TRANSFERRING SUBSTRATES AND SUBSTRATE TRANSFER APPARATUS EQUIPPED THEREWITH

摘要

PURPOSE: A hand for transferring a substrate and an apparatus for transferring a substrate including the same are provided to easily change the projection amount of a pad from a fork by including an elastic member including an adsorption flow path which communicates the fork and the pad. CONSTITUTION: A plurality of absorbing parts is prepared on a flat plane of a fork(1). A hand(4) for transferring a substrate adsorbs a substrate(2) accepted to a cassette(27) and carries the substrate. The hand for transferring the substrate moves to a horizontal direction by an expanding mechanism(26). A rotation mechanism(25) rotates the hand and the expanding mechanism to a horizontal plane. An lifting mechanism(24) raises the rotation mechanism, the expanding mechanism, and the hand to a vertical direction.