| 摘要 |
PURPOSE: A pattern processing device is provided to process patterns which have different shapes by processing tools. CONSTITUTION: At least one processing tool(152) of a processing tool assembly(150) forms a pattern on a processed substrate. An operating object(140) pressurizes the processing tool. A first actuator(100) drives the operating object. A second actuator(120) processes a pattern by moving the processed substrate or the processing tool assembly. A control unit(130) controls a first actuator and a second actuator according to pattern molding information. |
