| 摘要 |
PURPOSE: An in-line multi-stage far infrared ray heat treatment apparatus and system is provided to heat-treat a plurality of substrates for flat substrates for display at once by having multiple stage structured hot plates. CONSTITUTION: An in-line multi-stage far infrared ray heat treatment apparatus comprises a heat treatment unit(100) in which a plurality of heating parts(130) is arranged in multiple layers, and loaders(10) which transfer substrates(20) to the plurality of heating parts. The heating part comprises upper hot plates(117) which emit high temperature far infrared ray, lower hot plates(119), and substrate transferring parts(111). The substrate transfer part comprises a plurality of main shafts, auxiliary shafts which pass through the plurality of main shafts, a plurality of supporting members which support the main shaft, a tensile tool which controls tension of the assistant shaft, a spring, and rollers.
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