发明名称 PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ASSEMBLY METHOD THEREOF
摘要 <p>According to one embodiment, an assembly method of a projection optical system, including a lower tube and an upper tube, comprises: storing a relative positional relation between the lower tube and the upper tube in a state in which an optical characteristic of the projection optical system is adjusted; disassembling the lower tube and the upper tube; and adjusting relative positions of the lower tube and the upper tube, based on the stored relative positional relation, in next fixing the lower tube and the upper tube to each other.</p>
申请公布号 EP2449431(A1) 申请公布日期 2012.05.09
申请号 EP20100734826 申请日期 2010.07.01
申请人 NIKON CORPORATION 发明人 SHIRAISHI, MASAYUKI
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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