| 摘要 |
PURPOSE: A method and device for measuring the melt temperature of an ingot growing device are provided to improve the accuracy of temperature measurement by controlling the angle and position of an infrared temperature detector installed in a view port. CONSTITUTION: A view porter is installed at the upper side of a main chamber of an ingot growing device. An infrared temperature detector(13) is installed between front and rear support members to make a temperature sensor face a melt(15). The infrared temperature detector detects the temperature of a melt surface(16) of a scan region(S1,S2) by forward and backward rotation of a step motor. A vernier calipers type angle controller controls the angle of the infrared temperature detector. A scale label is displayed on the upper side of the support member to display the angle of the infrared temperature detector. An indication needle is installed on the axis of the infrared temperature detector and indicates the scale. |
