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发明名称
METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE
摘要
申请公布号
EP2449670(A2)
申请公布日期
2012.05.09
申请号
EP20100757630
申请日期
2010.06.15
申请人
FREESCALE SEMICONDUCTOR, INC.;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES
发明人
PERRUCHOT, FRANCOIS;LIU, LIANJUN;PACHECO, SERGIO;DEFAY, EMMANUEL;REY, PATRICE
分类号
H02N1/00
主分类号
H02N1/00
代理机构
代理人
主权项
地址
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