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发明名称
METHOD AND APPARATUS FOR PROBE TIP DIAMETER CALIBRATION
摘要
申请公布号
EP2449336(A1)
申请公布日期
2012.05.09
申请号
EP20100794487
申请日期
2010.06.29
申请人
HEXAGON METROLOGY, INC
发明人
MACMANUS, RICHARD
分类号
G01B3/00
主分类号
G01B3/00
代理机构
代理人
主权项
地址
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