发明名称 Silicon drift X-ray detector
摘要 A silicon drift detector used in an energy-dispersive X-ray spectrometer and having a background lower than heretofore. The detector has an X-ray detection device (1), an electrode terminal subassembly (2) for electrical connection, a Peltier device (3), and first and second shields (5,6) formed between the electrode terminal subassembly (2) and the Peltier device (3). The first shield (5) is made of a material consisting chiefly of an element having an atomic number smaller than the average atomic number of the elements included in the material of the Peltier device (3). The second shield (6) is made of a material consisting chiefly of an element having an atomic number greater than the atomic numbers of the elements included in the material of the Peltier device (3). The shields (5, 6) reduce the amount of secondary X-rays entering the X-ray detection device (1) after being produced from the Peltier device (3), the secondary X-rays being induced by X-rays transmitted through the detection device (1).
申请公布号 EP2202775(A3) 申请公布日期 2012.05.09
申请号 EP20090252804 申请日期 2009.12.16
申请人 JEOL LTD. 发明人 WATANABE, TOSHIYOSHI;MIYATAKE, KOUJI
分类号 H01J37/244;G01T1/36;H01J37/252;H01L31/00 主分类号 H01J37/244
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