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发明名称
METHOD FOR FABRICATING SILICON SINGLE CRYSTAL
摘要
申请公布号
EP1365048(B1)
申请公布日期
2012.05.09
申请号
EP20020712433
申请日期
2002.02.18
申请人
SUMCO CORPORATION;NEC CORPORATION
发明人
KANDA, T;KURAGAKI, S;WATANABE, M;EGUCHI, M
分类号
C30B29/06;C30B15/00;C30B15/20;C30B15/30
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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