SENSOR FOR SF6 GAS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A SF6 gas sensor and a manufacturing method thereof are provided to obtain a high sensitivity, a rapid response speed, and a restoration speed with respect to SF6 gas while maintaining the flexibility and transparency of a polyester material. CONSTITUTION: A SF6 gas sensor comprises a polyester film plate(10), a Pt thin film(30), a Zn thin film(50), and a ZnO nanorod(60). The Pt thin film is formed at least one part of one side of the plate. The Zn thin film is formed at least one part of the one side of the plate. The ZnO nanorod is formed on the Zn thin film.