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发明名称
Titania-doped quartz glass and making method
摘要
A titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900°C for 100 hours is suitable as the EUV lithography member.
申请公布号
EP2371774(A3)
申请公布日期
2012.05.09
申请号
EP20100252133
申请日期
2010.12.16
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
MAIDA, SHIGERU;OTSUKA, HISATOSHI;UEDA, TETSUJI;EZAKI, MASANOBU
分类号
C03C3/06;C03B8/04;C03B19/14;C03B20/00;C03C4/00;G02B3/00;G02B5/08
主分类号
C03C3/06
代理机构
代理人
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