发明名称 Semiconductor device having high frequency wiring and dummy metal layer at multilayer wiring structure
摘要 A semiconductor device, includes a semiconductor device, a wiring layer provided on the semiconductor substrate, a high frequency wiring provided in the wiring layer, and plural dummy metals provided in the wiring layer apart from the high frequency wiring, wherein the wiring layer in plan view includes a high frequency wiring vicinity region and an external region surrounding the high frequency wiring vicinity region, wherein the high frequency wiring vicinity region includes a first region enclosed by an outer edge of the high frequency wiring, and a second region surrounding the first region, wherein the plural dummy metals are disposed dispersedly in the high frequency wiring vicinity region and in the external region respectively, and wherein an average interval between the dummy metals in the high frequency wiring vicinity region is wider than that in the external region.
申请公布号 US8174092(B2) 申请公布日期 2012.05.08
申请号 US201113064325 申请日期 2011.03.18
申请人 UCHIDA SHINICHI;RENESAS ELECTRONICS CORPORATION 发明人 UCHIDA SHINICHI
分类号 H01L29/00;H01L21/8238 主分类号 H01L29/00
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