发明名称 Etchant composition, patterning conductive layer and manufacturing flat panel, display device using the same
摘要 An etchant composition that allows simplification and optimization of semiconductor manufacturing process is presented, along with a method of patterning a conductive layer using the etchant and a method of manufacturing a flat panel display using the etchant. The etchant includes nitric acid, phosphoric acid, acetic acid, and an acetate compound in addition to water.
申请公布号 US8173546(B2) 申请公布日期 2012.05.08
申请号 US201113167587 申请日期 2011.06.23
申请人 KIM BONG-KYUN;PARK HONG-SICK;CHOUNG JONG-HYUN;HONG SUN-YOUNG;LEE JI-SUN;LEE BYEONG-JIN;BAEK KUI-JONG;RHEE TAI-HYUNG;SONG YONG-SUNG;SAMSUNG ELECTRONICS CO., LTD.;TECHNO SEMICHEM CO., LTD. 发明人 KIM BONG-KYUN;PARK HONG-SICK;CHOUNG JONG-HYUN;HONG SUN-YOUNG;LEE JI-SUN;LEE BYEONG-JIN;BAEK KUI-JONG;RHEE TAI-HYUNG;SONG YONG-SUNG
分类号 H01L21/302 主分类号 H01L21/302
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