发明名称 Method and apparatus for manufacturing thin-film transistor array substrate
摘要 A method and apparatus of fabricating a thin film transistor array substrate is disclosed, which is capable of reducing fabrication time owing to a simplified fabrication process, wherein at least one of steps for forming a gate pattern, forming a semiconductor pattern, forming a data pattern, removing an ohmic contact layer pattern exposed between source and drain electrode patterns, and forming a conductive layer pattern is performed by a laser scribing process.
申请公布号 US8173457(B2) 申请公布日期 2012.05.08
申请号 US200913056971 申请日期 2009.08.03
申请人 LEE HYUNG SUP;JS LIGHTING CO., LTD. 发明人 LEE HYUNG SUP
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址