发明名称 |
System and method for correcting for pressure variations using a motor |
摘要 |
Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber. |
申请公布号 |
US8172546(B2) |
申请公布日期 |
2012.05.08 |
申请号 |
US20060602472 |
申请日期 |
2006.11.20 |
申请人 |
CEDRONE JAMES;GONNELLA GEORGE;ZAGARS RAYMOND A.;MCLOUGHLIN ROBERT F.;ENTEGRIS, INC. |
发明人 |
CEDRONE JAMES;GONNELLA GEORGE;ZAGARS RAYMOND A.;MCLOUGHLIN ROBERT F. |
分类号 |
F15B13/16 |
主分类号 |
F15B13/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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