| 摘要 |
PURPOSE: A flexible electronic circuit and a manufacturing method thereof are provided to control the damage of an island by forming a notch on a contact site of the island or a soft substrate. CONSTITUTION: An island including a hard thin film(2) is laminated on a soft substrate(1). The hard thin film is patterned by a photolithography process. A semiconductor device is installed in the island. A notch(3) is formed on a contact site of the island and a soft substrate. The notch is formed by focused ion beam. A Young's modulus of the soft substrate is smaller than a Young's modulus of the hard thin film. The notch prevents the separation or the generation of cracks between the soft substrate and the hard thin film.
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