| 摘要 |
PURPOSE: A multilayered film is provided not to have damage of a resin protection layer at removing a support film while bonding the support film and the resin protection layer at moderate level. CONSTITUTION: A multilayered film comprises a support film, a release layer, and a resin protection layer laminated in order. The release layer comprises one or more kinds selected from a silicon resin, a fluorine resin, and aliphatic wax. The resin protection layer comprises polyvinylalcohol or polyethylene glycol of which weight average molecular weight is 5,000-300,000. The adhesive force between the release layer and the protective layer is 0.0005-0.01 N/cm. The haze of the protection layer is 3.0% or less, and the development time per 1um is 10 seconds or shorter. |
