发明名称 |
Laser system for processing solar wafers in a carrier |
摘要 |
An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
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申请公布号 |
US8173473(B2) |
申请公布日期 |
2012.05.08 |
申请号 |
US20100891525 |
申请日期 |
2010.09.27 |
申请人 |
AQUI DEREK;ZUNIGA STEVEN M.;SUBBARAMAN VENKATESWARAN;LIEBSCHER KIRK;ALEXANDER JOHN;ZHANG ZHENHUA;RANA VIRENDRA V. S.;APPLIED MATERIALS, INC. |
发明人 |
AQUI DEREK;ZUNIGA STEVEN M.;SUBBARAMAN VENKATESWARAN;LIEBSCHER KIRK;ALEXANDER JOHN;ZHANG ZHENHUA;RANA VIRENDRA V. S. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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