| 发明名称 |
CONTAMINANT REDUCING SUBSTRATE TRANSPORT AND SUPPORT SYSTEM |
| 摘要 |
A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa. |
| 申请公布号 |
KR20120045029(A) |
申请公布日期 |
2012.05.08 |
| 申请号 |
KR20127004813 |
申请日期 |
2005.02.23 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PARKHE VIJAY D.;LEOPOLD MATTHEW;RONAN TIMOTHY;MARTIN TODD W.;NG EDWARD;KHURANA NITIN;SUH, SONG MOON;FAY RICHARD;HAGERTY CHRISTOPHER;RICE MICHAEL;ANGELO DARRYL;AHMANN KURT J.;TSAI MATTHEW C.;SANSONI STEVE |
| 分类号 |
H01L21/683;H01L21/68;H01L21/687 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
