LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS

摘要

PURPOSE: A leaf spring, a stage system, and a lithography device are provided to firmly mount a motor in a mirror block with 6 degrees of freedom by supplying three leaf springs in a different direction between a yoke and the mirror block. CONSTITUTION: A leaf spring(1) includes a rectangular panel type body(2). The panel type body includes a middle part(3) and two side parts(4). The side parts are connected to the middle part by an intermediate part(5). The leaf spring has high intensity in two orthogonal directions in the plane of the panel type body. A mirror block and a leaf spring are connected in a first mounting location(6).