发明名称 BUFFER LAYER DEPOSITION APPARATUS FOR THIN-FILM SOLAR CELLS AND METHOD FOR DEPOSITION OF BUFFER LAYER USING THE SAME
摘要 <p>PURPOSE: An apparatus for depositing a buffer layer for a thin film solar cell and a method for depositing a buffer layer using the same are provided to improve a work environment by controlling all processes in a main PC. CONSTITUTION: A reactive part(200) includes a plurality of reaction tanks(210,220) having a heater. The heater heats a mixed solution. The heated mixture is puts into a deposition bath. An input member soaks a thin film solar cell substrate in the deposition bath. A deposition part(300) includes an outlet bath discharging the mixed solution.</p>
申请公布号 KR101142417(B1) 申请公布日期 2012.05.07
申请号 KR20100085136 申请日期 2010.08.31
申请人 发明人
分类号 H01L31/18;H01L31/0445 主分类号 H01L31/18
代理机构 代理人
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