LASER SYSTEM AND APPARATUS AND METHOD FOR REPAIR

摘要

PURPOSE: A laser optical system and a repair apparatus and method using the same are provided to implement image-to-image high-speed repair work for a large area through a scan module and review repair works in real time from real-time images of a laser irradiating area and the peripheral portions. CONSTITUTION: A laser optical system(500) comprises a laser generator(501), a scan module(510), an objective lens(560), a relay lens(530), a review optical unit(550), and a control device(519). The laser generator generates a laser beam for repairing a substrate(570). The scan module reflects the laser beam generated by the laser generator to change the propagating path of the laser beam. The objective lens compresses the laser beam to be focused on the substrate. The relay lens guides the laser beam scanned through the scan module to the recognition range of the object lens. The review optical unit takes images of a substrate repair process in real time. The control device controls the scan module.