| 摘要 |
<p>PURPOSE: A barrel for etching a wafer is provided to prevent damage of a lot and a wafer edge by forming a wafer support rod with polypropylene. CONSTITUTION: A slot bar(122) is inserted into a support bracket(111-115). The support brackets are separately arranged from each other in order to support the inserted slot bars. A wafer support rod(132) is arranged between two adjacent slot bars. A rotation part(150) is connected to the slot bars and the wafer support rods. The rotation part rotates the slot bars.</p> |
