ELECTROSTATIC CHUCKING APPARATUS, SUBSTRATE PROCESSING APPARATUS COMPIRSING THE SAME, AND METHOD FOR MANUFACTURING OF ELECTROSTATIC CHUCKING APPARATUS

摘要

PURPOSE: An electrostatic adsorption apparatus, a substrate processing apparatus including the same, and a manufacturing method thereof are provided to insert a connector insertion groove into a connector connected to a DC power source supply device, thereby preventing damage of a chucking electrode. CONSTITUTION: An electrode connection part(140) is electrically connected to a chucking electrode(130). A connector connection part(150) is inserted into a port part in order not to be projected to the lower surface of a base member(110). The connector connection part electrically connects an external connector and the electrode connection part. A second insulating member(160) insulates the electrode connection part and the base member. The second insulating member insulates the connector connection part and the base member.