| 摘要 |
PURPOSE: A polarization actuator is provided to measure the strength of light on a pupil plane and to save costs required for the accurate position set of a polarizer in the illuminating unit of a projection exposing apparatus. CONSTITUTION: An apparatus for influencing the alignment of optical beams includes at least one optical elements which are capable of being moved to the transversal direction of optical beam(4). If the optical beam transmits the optical elements, the optical beam is affected. The optical elements include at least one light absorbing regions. The apparatus further includes a driving unit for the optical elements, a measuring unit detecting light from the optical beam, and a controlling unit. The driving unit depends on the positions of the light absorbing regions by the controlling unit. A projection exposing apparatus includes the apparatus for influencing the alignment of optical beams.
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