| 摘要 |
A transport apparatus includes a bearing assembly for transporting an article. The bearing assembly includes a support structure for receiving the article, and a plenum housing for receiving the support structure. The plenum housing and the support structure define a plenum cavity, the plenum cavity being configured to receive and direct a flowing gas for floatingly supporting the article above the support structure. The bearing assembly further includes at least one sensor assembly, which includes a sensor for transmitting and receiving energy emissions for determining a location of the article relative to the support structure. The sensor assembly may determine the location of the article relative to the support structure substantially through at least one aperture located on the bearing assembly. The article location determined by the sensor assembly may be communicated to a display panel or a control unit for adjusting the location if necessary.
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