发明名称 |
PLANARIZED MAGNETIC RECORDING DISK WITH PRE-PATTERNED SURFACE FEATURES AND SECURE ADHESION OF PLANARIZING FILL MATERIAL AND METHOD FOR PLANARIZING THE DISK |
摘要 |
A magnetic recording disk has surface features of elevated lands and recessed grooves, and a planarized upper surface. A chemical-mechanical-polishing (CMP) stop layer is deposited over the lands and into the recesses. An adhesion film, like silicon, is deposited over the CMP stop layer, and fill material containing a silicon oxide (SiOx) is deposited over and in contact with the adhesion film. The adhesion film improves the adhesion of the SiOx fill material and prevents delamination during a subsequent two-step CMP planarizing process. |
申请公布号 |
US2012107646(A1) |
申请公布日期 |
2012.05.03 |
申请号 |
US20100914647 |
申请日期 |
2010.10.28 |
申请人 |
RAWAT VIJAY PRAKASH SINGH;RUBIN KURT ALLAN;HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
RAWAT VIJAY PRAKASH SINGH;RUBIN KURT ALLAN |
分类号 |
G11B5/667;G11B5/66;G11B5/72;G11B5/725;G11B5/82;G11B5/84 |
主分类号 |
G11B5/667 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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