摘要 |
<p>A heating device (11A) is provided with a susceptor (12A) having a heating surface (12a) for heating a semiconductor. The susceptor (12A) is provided with a plate-shaped main body (13) and a surface anti-corrosion layer (14) facing the heating surface. The surface anti-corrosion layer (14) is formed from a ceramic material containing, as the main components, magnesium, aluminum, oxygen and nitrogen, wherein the ceramic material has, as the main phase, a magnesium-aluminum oxynitride phase having an XRD peak at least at 2?=47 to 50° when using CuKa radiation.</p> |
申请人 |
NGK INSULATORS, LTD.;KONDO, NOBUYUKI;WATANABE, MORIMICHI;JINDO, ASUMI;KATSUDA, YUJI;SATO, YOSUKE;ISODA, YOSHINORI |
发明人 |
KONDO, NOBUYUKI;WATANABE, MORIMICHI;JINDO, ASUMI;KATSUDA, YUJI;SATO, YOSUKE;ISODA, YOSHINORI |