PATTERN DETERMINATION DEVICE AND COMPUTER PROGRAM

摘要

The purpose of the present invention is to provide: a pattern determination unit that stably identifies concaves and convexes formed on a sample, regardless of a pattern formation status or image obtainment conditions; and a computer program. In order to achieve said purpose, provided are a device and a computer program that: find the surface area of a plurality of regions formed by profile waveforms of a certain threshold or less, for a profile formed based on a detection signal obtained by scanning a charged particle line for a sample; and determine that a section corresponding to a region with a relatively large surface area is a concave section or a space and/or that a section corresponding to space with a relatively small surface area is a convex section or a line section.