摘要 |
The invention relates to a resist structure for producing an X-ray optical grating structure. The invention comprises stabilizing bars (3) which are introduced into the resist structure. The webs (1) of the resist structure are applied to a substrate (2) at a first angle alpha, and the stabilizing bars at a second angle beta, wherein, between alpha and beta, there is preferably at least a spacing of 20° and at most a spacing of 70°, in order to obtain the best possible stabilizing action. In particular, the production of X-ray optical grating structures having aspect ratios of more than 500 is made possible without the grating structures bending or the stabilizing structure having a detrimental effect on the visibility. The resist structures are suitable in particular for producing X-ray optical grating structures from gold. |
申请人 |
KARLSRUHER INSTITUT FUER TECHNOLOGIE;MOHR, JUERGEN;LAST, ARNDT;NAZMOV, VLADIMIR;SIMON, MARKUS;GRUND, THOMAS;KENNTNER, JOHANNES |
发明人 |
MOHR, JUERGEN;LAST, ARNDT;NAZMOV, VLADIMIR;SIMON, MARKUS;GRUND, THOMAS;KENNTNER, JOHANNES |