发明名称 STACKED BODY AND METHOD FOR DETACHING STACKED BODY
摘要 <p>This stacked body is provided with: a support body that is transparent to light; a supported substrate that is supported by the support body; a bonding layer provided to the surface of the supported substrate on the side that is supported by the support body; and a detachment layer comprising a fluorocarbon and provided between the support body and the supported substrate. The detachment layer is formed in a manner so as to transform by means of absorbing light radiated through the support body.</p>
申请公布号 WO2012056803(A1) 申请公布日期 2012.05.03
申请号 WO2011JP69173 申请日期 2011.08.25
申请人 TOKYO OHKA KOGYO CO., LTD.;INAO, YOSHIHIRO;FUJII, YASUSHI;MATSUSHITA, ATSUSHI;TAMURA, KOKI;KUBO, ATSUSHI 发明人 INAO, YOSHIHIRO;FUJII, YASUSHI;MATSUSHITA, ATSUSHI;TAMURA, KOKI;KUBO, ATSUSHI
分类号 H01L21/683 主分类号 H01L21/683
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