STACKED BODY AND METHOD FOR DETACHING STACKED BODY
摘要
<p>This stacked body is provided with: a support body that is transparent to light; a supported substrate that is supported by the support body; a bonding layer provided to the surface of the supported substrate on the side that is supported by the support body; and a detachment layer comprising a fluorocarbon and provided between the support body and the supported substrate. The detachment layer is formed in a manner so as to transform by means of absorbing light radiated through the support body.</p>
申请公布号
WO2012056803(A1)
申请公布日期
2012.05.03
申请号
WO2011JP69173
申请日期
2011.08.25
申请人
TOKYO OHKA KOGYO CO., LTD.;INAO, YOSHIHIRO;FUJII, YASUSHI;MATSUSHITA, ATSUSHI;TAMURA, KOKI;KUBO, ATSUSHI