DETACH DEVICE OF FILM

摘要

PURPOSE: A film elimination device is provided to prevent a foreign material production phenomenon in a stripping process through an existing knurling process by forming a heating part by using a heating block and a heating blade. CONSTITUTION: A film elimination device comprises a fixed shaft(10) arranged on the top of a substrate support part, a moving shaft(20) which moves to up and down within the fixed shaft, and an elastic member(30). The film elimination device is composed of a heating part(40) and a substrate support part(50). The hearing part is composed of a heating block(42) having a controller capable of controlling temperature, and a heating blade(44) which conducts constant temperature from the heating block. The substrate support part supports a substrate. The fixed shaft is connected to a fixed shaft supporting part(15). The fixed shaft supporting part is connected to a supporter(60).