Manufacturing method of pre-sintered porous Si granules for porous reaction-bonded silicon nitride, pre-sintered porous granules therefrom

摘要

PURPOSE: A method for manufacturing pre-sintered silicon granule for porous reaction-sintered silicon nitride is provided to improve the air permeation property and capturing efficiency of the granule by controlling the size of pores. CONSTITUTION: A raw material includes silicon and a sintering supporting agent. The sintering supporting agent manufactures sintered silicon nitride based on the silicon. The raw material is granulated. The granulated raw material is pre-sintered under the inert atmosphere. The sintering supporting agent includes yttria and alumina. The sintering supporting agent further includes at least one alkaline earth metal oxide.