发明名称 Semiconductor Device Having Island Type Support Patterns
摘要 A semiconductor device includes a plurality of cylindrical structures arranged in a first direction and a second direction, and a plurality of unit regions formed in the first direction and the second direction, each of the plurality of unit regions including an island type support pattern supporting the plurality of cylindrical structures contacting side surfaces of the plurality of cylindrical structures and an open region exposing the side surfaces of the plurality of cylindrical structures.
申请公布号 US2012104559(A1) 申请公布日期 2012.05.03
申请号 US201113238408 申请日期 2011.09.21
申请人 KIM HYUN-CHUL;SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM HYUN-CHUL
分类号 H01L29/06 主分类号 H01L29/06
代理机构 代理人
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