| 摘要 |
According to embodiments of the present invention, a transducer is provided. The transducer includes a first electrode, a second electrode disposed over the first electrode such that the first electrode and the second electrode form respective capacitive electrodes of a capacitor, the second electrode comprising a core portion and a peripheral portion, a third electrode disposed relative to the second electrode such that the third electrode overlaps with the peripheral portion of the second electrode, and a piezoelectric element disposed between the peripheral portion of the second electrode and the third electrode, so as to tune a tensional force provided by the piezoelectric element onto the second electrode by varying a piezoelectric voltage applied between the second electrode and the third electrode. |
