| 摘要 |
PURPOSE: An anisotropic vibration actuator is provided to arrange anisotropic movements which only allow vibrations in a specific direction, thereby improving processing performance in a super fine processing process. CONSTITUTION: A driving part(100) is extended in a longitudinal direction. A piezoelectric device(200) is used as a driving source of the driving part in a predetermined region of the driving part. A supporting part(300) is combined in the predetermined region of one side and the other side of the driving part in a height direction. An alignment part(400) is extended to one side of the driving part in the height direction in order to determine directionality of vibrations. The piezoelectric device is fixed in a driving source insertion part(110) which is arranged in one lateral surface of the driving part in the longitudinal direction. The piezoelectric device is inserted in the driving source insertion part in order to arrange the longitudinal direction of the piezoelectric device parallel to the direction of the driving part.
|
