LITI APPARATUS, METHOD OF LITI AND FABRICATING METHOD OF USING THE SAME

摘要

PURPOSE: A laser thermal transfer apparatus, a laser thermal transfer method, and an organic light emitting display device manufacturing method using the same are provided to prevent thermal imbalance applied on a donor film and a substrate due to a laser beam, thereby preventing transfer failure. CONSTITUTION: A donor film(20) is arranged on a substrate(10). The donor film comprises a transfer layer(23), a base film(21), and a photo-thermal conversion layer(22). A laser beam projection unit(30) comprises a laser oscillation apparatus(31), a first optical system(32), and a second optical system(34). A mask(33) is arranged between the first optical system and the second optical system. An opening part(332) of the mask comprises a pair of first sides and a pair of second sides.