| 摘要 |
PURPOSE: A device for removing a sticking foreign substance on a surface of a glass is provided to improve the yield of a product and minimize the physical influence of a glass because a foreign substance is removed by using ultrasonic vibrations. CONSTITUTION: A device for removing a sticking foreign substance on a surface of a glass(100) comprises a vacuum granite plate(10), an ultrasonic oscillation unit(20), a X-shaft robot, a Z-shaft robot, a Y-shaft robot, an ultrasonic vibration tip, a gap sensor and a controller The vacuum granite plate steadily adsorbs the glass(20). The ultrasonic oscillation unit is installed inside the granite plate and vibrated by the ultrasound oscillation. The X, Y and the Z-shaft robot move in the direction of X, Y, and Z. The ultrasonic vibration tip is attached to a Z-axis attaching plate. The gap sensor moves above and below with sensing the height of a sticking foreign substance or micro particle on the glass. The controller controls the ultrasonic oscillation unit and an operating unit.
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