CERAMIC MATERIAL, MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, SPUTTERING TARGET MEMBER AND METHOD FOR PRODUCING CERAMIC MATERIAL

摘要

This ceramic material contains magnesium, aluminum, oxygen and nitrogen as main components, and has, as the main phase, a crystalline phase of an MgO-AlN solid solution wherein aluminum nitride is solid-solved in magnesium oxide. It is preferable that the MgO-AlN solid solution has XRD peaks of the (200) plane and the (220) plane, as obtained using a CuKa ray, at 2? = 42.9-44.8°, 62.3-65.2° which are between the peak of cubic crystals of magnesium oxide and the peak of cubic crystals of aluminum nitride. It is more preferable that the MgO-AlN solid solution has an XRD peak of the (111) plane at 2? = 36.9-39° which is between the peak of cubic crystals of magnesium oxide and the peak of cubic crystals of aluminum nitride.