| 摘要 |
<p>A substrate transfer device is provided with: a robot hand (21) capable of supporting substrates by being inserted below the substrates; a robot hand raising/lowering mechanism for raising and lowering the robot hand (21); surface potential detection parts (24) that are disposed on the robot hand (21), and that are capable of detecting the surface potential of the lower surfaces of the supported substrates when the substrates are being supported by the robot hand (21); and a control unit that can variably adjust the speed at which the substrates are raised by controlling the driving of the robot hand raising/lowering mechanism. On the basis of changes in the surface potential of the lower surface of a substrate that occur when the substrate is raised at a predetermined speed, said changes being detected by the surface potential detection parts (24), the control unit determines the speed at which to raise other substrates of the same type which are subsequently raised.</p> |
