发明名称 |
ALIGNMENT METHOD, ALIGNMENT APPARATUS, AND ORGANIC EL ELEMENT MANUFACTURING APPARATUS |
摘要 |
Provided are an alignment method and an alignment apparatus, in which the number of times to carry out alignment operation is reduced to reduce damage of a substrate and a mask and improve the productivity of evaporation using the mask. Vibrations in the direction of gravity of a substrate immediately after the substrate is brought in are measured by a laser vibrometer. Based on the obtained vibration data, a vibration control portion generates an antiphase vibrational wave. After the vibrational wave is applied to the substrate to reduce the vibrations of the substrate, the alignment between the substrate and a mask is carried out.
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申请公布号 |
US2012103255(A1) |
申请公布日期 |
2012.05.03 |
申请号 |
US201113270520 |
申请日期 |
2011.10.11 |
申请人 |
FUKUDA NAOTO;CANON KABUSHIKI KAISHA |
发明人 |
FUKUDA NAOTO |
分类号 |
C23C16/458;B65G47/24;C23C16/04 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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